150 mm Automated Test System

The ATS-8000A test system is a fully automated 2-pin probing solution for HBM, TLP, HMM and CC-TLP on package- and wafer-level.
Future extension for CDM is optional.

A ATS-8000A system has been installed at the Fraunhofer Research Institution for Microsystems and Solid State Technologies in Munich in 2018:


  • Vacuum chuck rotary stage for any package shape, any package size and wafers
  • Probe force sensors for maximum probe tip life time and to avoid job interruption
  • L/R 3-axis motion systems for ultra-fast speed to maximize throughput
  • Moving target video cam system to combine image files and data
  • User interface based on standard HPPI software


Product Data Sheet ATS-8000A PDF
Product Video ATS-8000A (Direct Video Download to Avoid YouTube) HPPI_sm.m4v
Product Video ATS-8000A (Youtube Link)

System Components

Item Sub-Item Qty. Description Model Number
1 1.0 1 Automated Test System ATS-8000A
1.1 2 150 mm X/Y-stages , absolute encoder XY150
1.2 2 24 mm Z-stages, absolute encoder Z24
1.3 2 Probearm fixture platform 75 mm x 75 mm PFP-75A
1.4 2 Touch-down force sensors TDS-A
1.5 1 Ceramic compound vacuum chuck Ø240 mm VC-240A
1.6 1 Optional: Ø240 mm rotary stage, non-stop rotation, absolute encoder for vacuum chuck VRC-240A
1.7 1 Moving target video camera system MTC-18M
1.8 1 Motion system controller PL8885
1.9 1 Honeycomb breadboard 1000 mm x 800 mm x 70 mm 707-0810-V1
1.10 1 Accessories fixture kit AF-A
1.11 1 Table support 766-0507-AS
1.12 1 HPPI automation software ATS-OC

Physical Dimensions [mm]

Note: Darkbox not included in ATS-8000A system.